Switching characteristics
24 March 2009
Triaxial cable kits enable fast device characterisation.
Characterising semiconductor devices electrically and understanding the processes used in their production demands a wide array of measurements, including DC I-V, C-V, and pulsed I-V measurements. One of the most significant challenges associated with integrating these measurement types in a single characterisation system is that each one has fundamentally different cabling requirements. For example, making low current I-V measurements demands guarding, so triaxial cables are required. C-V measurements are typically made using four coaxial cables with their outer shells connected together to control the characteristic impedance the signals encounter. Pulsed measurements require the highest bandwidth of the three measurement types, so the characteristic impedance of the cabling must match the source impedance in order to prevent reflections from the DUT from reflecting off the source.
A new cabling kit based on a patent-pending design that speeds and simplifies the process of making DC I-V, C-V, and pulsed I-V testing connections from any modern semiconductor parameter analyser to a Cascade Microtech or SUSS MicroTec prober was released by Keithley Instruments. The cables are designed for compatibility with Keithley’s Model 4200-SCS Semiconductor Characterisation System, as well as with other test instruments used for characterisation.
The design of these triaxial cable kits makes them suitable for those whose characterisation requirements demand frequent switching between measurement types. These new cable kits eliminate the need for recabling when switching between measurement types, also eliminating the measurement errors that often result from cabling errors. Two versions of the cable kit are available—one for use with Cascade Microtech probers and the other for use with SUSS MicroTec probers.
Keithley’s new cabling kits claim that no matter what type of measurement is being made, no changes to the probe manipulator cabling are required; instead, the cables can simply be moved from one set of instrument connections to another, which makes it easier to switch between I-V measurements, C-V measurements, and pulsed I-V testing, simplifying the device characterisation process. In addition, the setup changes can be made while the probe needles are in contact with a wafer, reducing pad damage and maintaining the same contact impedance for all three types of measurements.
Keithley’s Model 4200-SCS replaces a variety of electrical test tools with a single characterisation solution and can be used for a variety of applications including semiconductor technology development, process development, and materials research in reliability labs, materials and device research labs and consortia, as well as any lab needing a benchtop DC or pulse instrument.
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