MEMS technology for air flow measurement
09 March 2010
Using Micro Electro Mechanical Systems technology has resulted in a high precision flow sensor.
The FM200 Digital Flow Sensor Series from SUNX is available from Panasonic and allows measurement of air flow to be displayed on a four digit dual colour LCD display.
The rectification mechanism and a MEMS technology means that a high precision (±3% FS), high speed (50mS) flow sensor has been developed for the automation industry. Suitable for measuring the flow of clean and compressed air and also nitrogen gas, these sensors can measure flow rates from 500ml/min up to 1,000 l/min.
The two digital outputs (PNP or NPN) mean the sensor can operate in several modes including simple on/off control and also a window comparator mode. An output can also be configured for a pulse output proportional to flow rate, allowing the user to monitor and measure air consumption for cost management purposes. An analogue output is also available for this function and can be configured to detect the flow direction as well as the flow rate.
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